A 2-DOF nano-positioning scanner with novel compound decoupling-guiding mechanism
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Title
A 2-DOF nano-positioning scanner with novel compound decoupling-guiding mechanism
Authors
Keywords
Nano-positioning scanner, Decoupling-guiding mechanism, Compliant mechanism, PID controller
Journal
MECHANISM AND MACHINE THEORY
Volume 155, Issue -, Pages 104066
Publisher
Elsevier BV
Online
2020-09-02
DOI
10.1016/j.mechmachtheory.2020.104066
References
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