RF power transfer efficiency and plasma parameters of low pressure high power ICPs

Published 2021 View Full Article

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Title
RF power transfer efficiency and plasma parameters of low pressure high power ICPs
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2021-01-07
DOI
10.1088/1361-6463/abd8ee

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