Deposition and XPS studies of dual sputtered BCN thin films

Published 2016 View Full Article

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Title
Deposition and XPS studies of dual sputtered BCN thin films
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 64, Issue -, Pages 80-88
Publisher
Elsevier BV
Online
2016-01-21
DOI
10.1016/j.diamond.2016.01.014

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