Influence of the silicon and oxygen content on the properties of non-hydrogenated amorphous carbon coatings

Published 2016 View Full Article

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Title
Influence of the silicon and oxygen content on the properties of non-hydrogenated amorphous carbon coatings
Authors
Keywords
Sputter deposition, Non-hydrogenated Si/O-doped a-C films, Hardness, Tribology, Friction
Journal
DIAMOND AND RELATED MATERIALS
Volume 70, Issue -, Pages 201-210
Publisher
Elsevier BV
Online
2016-11-04
DOI
10.1016/j.diamond.2016.10.024

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