PECVD of carbon by inverted fireballs: From sputtering, bias enhanced nucleation to deposition

Published 2016 View Full Article

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Title
PECVD of carbon by inverted fireballs: From sputtering, bias enhanced nucleation to deposition
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 65, Issue -, Pages 96-104
Publisher
Elsevier BV
Online
2016-03-03
DOI
10.1016/j.diamond.2016.02.021

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