Enhanced Response of Co-Planar MEMS Microheater-Based Methane Gas Sensor

Published 2020 View Full Article

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Title
Enhanced Response of Co-Planar MEMS Microheater-Based Methane Gas Sensor
Authors
Keywords
-
Journal
IEEE SENSORS JOURNAL
Volume 20, Issue 23, Pages 14132-14140
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-07-14
DOI
10.1109/jsen.2020.3009032

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