Effect of sputter pressure on UV photodetector performance of WO3 thin films

Title
Effect of sputter pressure on UV photodetector performance of WO3 thin films
Authors
Keywords
WO, 3, film, Sputter pressure, Photodetector, Responsivity, External Quantum Efficiency
Journal
APPLIED SURFACE SCIENCE
Volume 536, Issue -, Pages 147947
Publisher
Elsevier BV
Online
2020-09-24
DOI
10.1016/j.apsusc.2020.147947

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