High-efficiency synthesis of large-area monolayer WS2 crystals on SiO2/Si substrate via NaCl-assisted atmospheric pressure chemical vapor deposition

Title
High-efficiency synthesis of large-area monolayer WS2 crystals on SiO2/Si substrate via NaCl-assisted atmospheric pressure chemical vapor deposition
Authors
Keywords
Monolayer, Dual-tube CVD, Halide salts, Uniformity, Raman mapping
Journal
APPLIED SURFACE SCIENCE
Volume 533, Issue -, Pages 147479
Publisher
Elsevier BV
Online
2020-08-09
DOI
10.1016/j.apsusc.2020.147479

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