Optimal Cooling System Design for Increasing the Crystal Growth Rate of Single-Crystal Silicon Ingots in the Czochralski Process Using the Crystal Growth Simulation

Numerical analysis of effect of thermal stress depending on pulling rate on behavior of intrinsic point defects in large-diameter Si crystal grown by Czochralski method

(2019) Yuji Mukaiyama et al.   JOURNAL OF CRYSTAL GROWTH

Control of heat transfer in continuous-feeding Czochralski-silicon crystal growth with a water-cooled jacket

(2017) Wenhan Zhao et al.   JOURNAL OF CRYSTAL GROWTH

Crystal twisting in Cz Si growth

(2015) Vladimir Kalaev et al.   JOURNAL OF CRYSTAL GROWTH

Convective Heat Transfer in a High Aspect Ratio Minichannel Heated on One Side

(2015) Eric C. Forrest et al.   JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME

Ab initio study of vacancy and self-interstitial properties near single crystal silicon surfaces

(2012) Eiji Kamiyama et al.   JOURNAL OF APPLIED PHYSICS

Theoretical study of the impact of stress on the behavior of intrinsic point defects in large-diameter defect-free Si crystals

(2012) Koji Sueoka et al.   JOURNAL OF CRYSTAL GROWTH

Thermal optimization of CZ bulk growth and wafer annealing for crystalline dislocation-free silicon

(2010) A.I. Prostomolotov et al.   JOURNAL OF CRYSTAL GROWTH

Effect of crystal and crucible rotations on the interface shape of Czochralski grown silicon single crystals

(2010) Omidreza Asadi Noghabi et al.   JOURNAL OF CRYSTAL GROWTH

Effect of the Ingot Cooling on the Grown-in Defects in Silicon Czochralski Growth

(2009) Bok-Cheol Sim et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Formation of parallel (111) twin boundaries in silicon growth from the melt explained by molecular dynamics simulations

(2009) Johan Pohl et al.   JOURNAL OF CRYSTAL GROWTH

Lateral incorporation of vacancies in Czochralski silicon crystals

(2008) Milind S. Kulkarni   JOURNAL OF CRYSTAL GROWTH

Effects of crystal rotation rate on the melt–crystal interface of a CZ-Si crystal growth in a transverse magnetic field

(2007) Lijun Liu et al.   JOURNAL OF CRYSTAL GROWTH