Thermal Transport and Frequency Response of Localized Modes on Low-Stress Nanomechanical Silicon Nitride Drums Featuring a Phononic-Band-Gap Structure
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Title
Thermal Transport and Frequency Response of Localized Modes on Low-Stress Nanomechanical Silicon Nitride Drums Featuring a Phononic-Band-Gap Structure
Authors
Keywords
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Journal
Physical Review Applied
Volume 14, Issue 2, Pages -
Publisher
American Physical Society (APS)
Online
2020-08-26
DOI
10.1103/physrevapplied.14.024068
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