The effect of thickness on surface structure of rf sputtered TiO2 thin films by XPS, SEM/EDS, AFM and SAM

Published 2020 View Full Article

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Title
The effect of thickness on surface structure of rf sputtered TiO2 thin films by XPS, SEM/EDS, AFM and SAM
Authors
Keywords
TiO, 2, thin film, rf sputtering system, X-ray photoelectron spectroscopy, Atomic force microscopy, Scanning acoustic microscopy, Hardness
Journal
VACUUM
Volume -, Issue -, Pages 109766
Publisher
Elsevier BV
Online
2020-09-14
DOI
10.1016/j.vacuum.2020.109766

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