Reactive sputtering of CSx thin solid films using CS2 as precursor

Published 2020 View Full Article

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Title
Reactive sputtering of CSx thin solid films using CS2 as precursor
Authors
Keywords
Carbon-based nanostructured materials, Protective and hard coatings, Reactive direct current magnetron sputtering, Thin film characterization
Journal
VACUUM
Volume -, Issue -, Pages 109775
Publisher
Elsevier BV
Online
2020-09-13
DOI
10.1016/j.vacuum.2020.109775

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