Journal
VACUUM
Volume 179, Issue -, Pages -Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2020.109545
Keywords
Ionisation gauge; Hot cathode; Sensitivity; Secondary electrons; Electron stimulated desorption
Funding
- EMPIR programme [16NRM05]
- European Union
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A literature review starting from 1950 is given on the design and geometry of ionisation gauge types with hot cathodes. Considerations on the material of the electrodes and of surface effects are included. The review focuses on the design issues for measurement accuracy, linearity, repeatability, reproducibility, and stability of sensitivity. Also, the attempts to reduce the lower measurement limit are reviewed to some extent.
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