Thickness-controlled multilayer hexagonal boron nitride film prepared by plasma-enhanced chemical vapor deposition

Published 2016 View Full Article

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Title
Thickness-controlled multilayer hexagonal boron nitride film prepared by plasma-enhanced chemical vapor deposition
Authors
Keywords
Hexagonal boron nitride, Plasma-enhanced chemical vapor deposition, Thickness control, Platinum foil
Journal
CURRENT APPLIED PHYSICS
Volume 16, Issue 9, Pages 1229-1235
Publisher
Elsevier BV
Online
2016-05-04
DOI
10.1016/j.cap.2016.03.025

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