The effect of spot overlap ratio on femtosecond laser planarization processing of SiC ceramics

Published 2020 View Full Article

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Title
The effect of spot overlap ratio on femtosecond laser planarization processing of SiC ceramics
Authors
Keywords
Femtosecond laser, Silicon carbide ceramics, Planarization processing, Spot overlap ratios, Residual stress
Journal
OPTICS AND LASER TECHNOLOGY
Volume 129, Issue -, Pages 106270
Publisher
Elsevier BV
Online
2020-04-10
DOI
10.1016/j.optlastec.2020.106270

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