Nucleation and Initial Stages of Growth during the Atomic Layer Deposition of Titanium Oxide on Mesoporous Silica

Published 2020 View Full Article

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Title
Nucleation and Initial Stages of Growth during the Atomic Layer Deposition of Titanium Oxide on Mesoporous Silica
Authors
Keywords
-
Journal
NANO LETTERS
Volume 20, Issue 9, Pages 6884-6890
Publisher
American Chemical Society (ACS)
Online
2020-08-26
DOI
10.1021/acs.nanolett.0c02990

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