Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 29, Issue 5, Pages 1137-1166Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2020.3020787
Keywords
Resonators; oscillators; frequency reference; timing; microelectromechanical systems
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Funding
- National Natural Science Foundation of China [51905386]
- Fundamental Research Funds for the Central Universities of China [2042019kf0012]
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An overview of microelectromechanical systems (MEMS) resonators for frequency reference and timing applications is presented. The progress made in the past few decades in design, modeling, fabrication and packaging of MEMS resonators is summarized. In particular, the state-of-the-art technologies for improving the overall performance of MEMS resonators, such as quality factor (Q), motional impedance, temperature sensitivity, and initial frequency uniformity, are reviewed in detail. The challenges and opportunities during the commercialization of MEMS resonators are also stated, and future development trends driven either by technology or market are outlined. This paper intends to provide an outlook for possible research directions of MEMS resonators in frequency reference and timing applications. With outstanding reliability, unique multi-frequency functionality on a single chip, and high accuracy, MEMS resonators show great potential for replacing the quartz crystal resonators which have been dominating the timing market since 1920s. [2020-0106]
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