Investigation of Nanoscale TiN/MoN Multilayered Systems, Fabricated Using Arc Evaporation

Published 2015 View Full Article

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Title
Investigation of Nanoscale TiN/MoN Multilayered Systems, Fabricated Using Arc Evaporation
Authors
Keywords
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Journal
ACTA PHYSICA POLONICA A
Volume 128, Issue 5, Pages 836-841
Publisher
Institute of Physics, Polish Academy of Sciences
Online
2015-12-14
DOI
10.12693/aphyspola.128.836

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