Sheath Structure in Electronegative Plasma Having Cold Ions: An Impact of Negative Ions’ Mass

Published 2020 View Full Article

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Title
Sheath Structure in Electronegative Plasma Having Cold Ions: An Impact of Negative Ions’ Mass
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 48, Issue 7, Pages 2408-2417
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-06-11
DOI
10.1109/tps.2020.2998717

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