Energy-Efficient Monolithic 3-D SRAM Cell With BEOL MoS2 FETs for SoC Scaling

Title
Energy-Efficient Monolithic 3-D SRAM Cell With BEOL MoS2 FETs for SoC Scaling
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 67, Issue 10, Pages 4216-4221
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-09-02
DOI
10.1109/ted.2020.3018099

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