RF Sputtered MoO3 Thin Film on Si (100) for Gas Sensing Applications

Title
RF Sputtered MoO3 Thin Film on Si (100) for Gas Sensing Applications
Authors
Keywords
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Journal
DEFENCE SCIENCE JOURNAL
Volume 70, Issue 5, Pages 505-510
Publisher
Defence Scientific Information and Documentation Centre
Online
2020-10-20
DOI
10.14429/dsj.70.16342

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