Single-crystalline SiC integrated onto Si-based substrates via plasma-activated direct bonding

Published 2020 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Single-crystalline SiC integrated onto Si-based substrates via plasma-activated direct bonding
Authors
Keywords
Direct bonding, Plasma activation, Silicon carbide, Bonding interface
Journal
CERAMICS INTERNATIONAL
Volume 46, Issue 14, Pages 22718-22726
Publisher
Elsevier BV
Online
2020-06-08
DOI
10.1016/j.ceramint.2020.06.036

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.