Journal
APPLIED PHYSICS LETTERS
Volume 117, Issue 13, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/5.0018818
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Funding
- Office of Naval Research Grant [N00014-20-1-2126, N00014-20-1-2176]
- NSF RAISE TAQ Award [1839196]
- DARPA DETECT program through an ARO Grant [W911NF-16-2-0151]
- NSF EFRI Grant [EFMA-1640959]
- Packard Foundation
- NSF CCMR MRSEC Award [1719875]
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [1839196] Funding Source: National Science Foundation
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Superconducting nanowires used in single-photon detectors have been realized on amorphous or poly-crystalline films. Here, we report the first use of single-crystalline NbN thin films for superconducting nanowire single-photon detectors (SNSPDs). Grown by molecular beam epitaxy (MBE) at high temperature on nearly lattice-matched AlN-on-sapphire substrates, the NbN films exhibit a high degree of uniformity and homogeneity. Even with relatively thick films, the fabricated nanowire detectors show saturated internal efficiency at near-IR wavelengths, demonstrating the potential of MBE-grown NbN for realizing large arrays of on-chip SNSPDs and their integration with AlN-based chi ( 2 ) quantum photonic circuits.
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