Fabrication and characterization of Mg-doped ε-Ga2O3 solar-blind photodetector

Published 2020 View Full Article

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Title
Fabrication and characterization of Mg-doped ε-Ga2O3 solar-blind photodetector
Authors
Keywords
Mg dopant, ε-Ga, 2, O, 3, Solar-blind, Magnetron sputtering, MOCVD
Journal
VACUUM
Volume 177, Issue -, Pages 109425
Publisher
Elsevier BV
Online
2020-04-28
DOI
10.1016/j.vacuum.2020.109425

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