Improved emitter performance of RIE black silicon through the application of in-situ oxidation during POCl3 diffusion

Published 2020 View Full Article

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Title
Improved emitter performance of RIE black silicon through the application of in-situ oxidation during POCl3 diffusion
Authors
Keywords
Phosphorus diffusion, In-situ oxidation, Field effect passivation, Emitter recombination, Black silicon
Journal
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 210, Issue -, Pages 110480
Publisher
Elsevier BV
Online
2020-03-18
DOI
10.1016/j.solmat.2020.110480

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