Multi-linear antenna microwave plasma assisted large-area growth of 6 × 6 in.2 vertically oriented graphenes with high growth rate
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Title
Multi-linear antenna microwave plasma assisted large-area growth of 6 × 6 in.2 vertically oriented graphenes with high growth rate
Authors
Keywords
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Journal
REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 91, Issue 7, Pages 076105
Publisher
AIP Publishing
Online
2020-07-22
DOI
10.1063/1.5142756
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