Diamond turned micro machined metal diaphragm based Fabry Perot pressure sensor

Published 2020 View Full Article

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Title
Diamond turned micro machined metal diaphragm based Fabry Perot pressure sensor
Authors
Keywords
Fabry Perot Interferometer (FPI), Pressure sensor, Diamond Turning Machining (DTM), Diaphragm deflection, Cu-Be Alloy (CBA), Fiber optic sensors (FOS), Full-scale deflection (FSD), White light interferometry
Journal
OPTICS AND LASER TECHNOLOGY
Volume 128, Issue -, Pages 106243
Publisher
Elsevier BV
Online
2020-04-21
DOI
10.1016/j.optlastec.2020.106243

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