Dynamic Surface evolution and scaling studies on TiO2 thin films by Ti ion implantation

Published 2020 View Full Article

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Title
Dynamic Surface evolution and scaling studies on TiO2 thin films by Ti ion implantation
Authors
Keywords
TiO, 2, thin film, Ion irradiation with Ti ions, AFM, Dynamic evolution, Scaling
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 474, Issue -, Pages 68-73
Publisher
Elsevier BV
Online
2020-04-30
DOI
10.1016/j.nimb.2020.04.031

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