Review
Chemistry, Multidisciplinary
Antonio Alessio Leonardi, Maria Jose Lo Faro, Alessia Irrera
Summary: This article discusses the emerging technology of metal-assisted chemical etching (MACE) for the fabrication of silicon nanowires, comparing all the main routes for Si NWs and analyzing factors such as equipment cost, process complexity, repeatability, and the potential for commercial transfer in the field of microelectronics.
Article
Chemistry, Multidisciplinary
Calvin Eldona, Naufal Hanif Hawari, Faiq Haidar Hamid, Wibke Dempwolf, Ferry Iskandar, Erwin Peiner, Hutomo Suryo Wasisto, Afriyanti Sumboja
Summary: In this study, a dense 1D polyaniline/silicon nanowire forest electrode is fabricated through facile metal-assisted chemical etching and in-situ polymerization of aniline. This hybrid electrode shows high cycling performance and stable capacity at various charge-discharge rates due to the reduction in solid electrolyte interface resistance and the increased conductivity.
CHEMISTRY-AN ASIAN JOURNAL
(2022)
Article
Nanoscience & Nanotechnology
Amin Farhadi, Theresa Bartschmid, Gilles R. Bourret
Summary: In this study, thermal dewetting was used to structure gold-based catalytic etching masks for metal-assisted chemical etching (MACE). The approach involved low-temperature dewetting of metal films to generate metal holey meshes with tunable morphologies. Combined with MACE, dewetting-assisted patterning provided a simple route to synthesize Si nanotubes, Si nanowalls, and Si nanowires with defined dimensions and optical properties.
ACS APPLIED MATERIALS & INTERFACES
(2023)
Article
Chemistry, Multidisciplinary
Julian A. Michaels, Lukas Janavicius, Xihang Wu, Clarence Chan, Hsieh-Chih Huang, Shunya Namiki, Munho Kim, Dane Sievers, Xiuling Li
Summary: This paper presents a plasma-free, open-circuit, photo-induced metal-assisted chemical etch method for fabricating micro and nanoscale features on Silicon carbide without causing high energy ion-related surface damage. The comprehensive exploration of parameter space demonstrates the controllability and versatility of this technique in producing ordered arrays of micro and nanoscale SiC structures with porous or solid sidewalls, while elucidating the etching mechanism.
ADVANCED FUNCTIONAL MATERIALS
(2021)
Article
Engineering, Electrical & Electronic
Kirill A. Gonchar, Daniil Moiseev, Ivan Bozhev, Liubov A. Osminkina
Summary: Porous silicon nanowires (PSi NWs) were fabricated using a two step metal-assisted chemical etching method, and it was found that their structural and optical properties depend on the concentration of hydrogen peroxide. The thickness ratio of layers and size of nanocrystals can be tuned by choosing the required concentration of H2O2.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2021)
Review
Chemistry, Analytical
Kurt W. Kolasinski
Summary: The electroless etching of semiconductors has become an advanced microfabrication process with the addition of structured metal catalysts. This technique allows for the precise patterning of wafer substrates and the production of nanoparticles, leading to the creation of porous structures and nanostructured powders. Metal-assisted catalytic etching can be controlled to produce various pore structures in substrates and nanowires with different core compositions.
Article
Materials Science, Multidisciplinary
Chuhao Yao, Yue Zhao, Xiaomeng Zhang, Hailiang Li, Changqing Xie
Summary: A novel and facile scheme for fabricating highly uniform vertically aligned silicon nanowires (Si-NWs) arrays was presented, demonstrated numerically with excellent properties. The method involves fabricating thin gold (Au) nanostructures using magnetron sputtering followed by metal-assisted chemical etching at low temperature to achieve wafer-scale and highly uniform Si-NWs arrays. The Si-NWs arrays showed promising photoelectric conversion performance, with a maximum exciton generation rate of 1.76 x 10(24) and a reflectivity below 10% over a wide wavelength range at an annealing temperature of 200 degrees C.
RESULTS IN PHYSICS
(2021)
Article
Chemistry, Physical
Zhao Zhang, Fengshuo Xi, Shaoyuan Li, Xiaohan Wan, Wenhui Ma, Xiuhua Chen, Zhengjie Chen, Rong Deng, Jingjia Ji, Hua-Jun Fan, CheeMun Chong
Summary: This study presents a new strategy to effectively manage and utilize silicon cutting waste generated by the growing photovoltaic industry, resulting in the fabrication of high-performance lithium-ion battery anode materials with excellent capacity retention and rate performance. The combination of nanocopper-assisted chemical etching technology and graphite/CNTs coating technology shows promising results in improving electrode conductivity and stability, making silicon waste a cost-effective source for high-performance anode material preparation.
MATERIALS TODAY ENERGY
(2021)
Article
Chemistry, Multidisciplinary
Ioannis Kochylas, Spiros Gardelis, Vlassis Likodimos, Konstantinos P. Giannakopoulos, Polycarpos Falaras, Androula G. Nassiopoulou
Summary: In this study, highly sensitive substrates for Surface-Enhanced-Raman-Scattering (SERS) spectroscopy were developed by decorating silicon nanowires (SiNWs) with silver nanostructures using single-step Metal Assisted Chemical Etching (MACE). The substrates showed considerably lower limit of detection (LOD) and better uniformity in SERS activity when decorated with silver aggregates compared to dendritic structures. Enhancement factors ranging from 10^5 to 10^10 were calculated, demonstrating very high SERS sensitivities for analytical applications.
Article
Chemistry, Multidisciplinary
Rocio Barrio, Nieves Gonzalez, Alvaro Portugal, Carmen Morant, Jose Javier Gandia
Summary: Researchers propose using thin films based on silicon as electrodes in commercial lithium-ion batteries, which have higher storage capacity. By doping and optimizing the growth conditions, the stability and longevity of the batteries can be improved.
Article
Chemistry, Physical
Weilun Chen, Kongyao Chen, Rui Zeng, Min Wan, Yixuan Guo, Yaqi Liao, Jiayu Peng, Wuxing Zhang, Yunhui Huang
Summary: This study presents a design of an S-containing artificial solid electrolyte interphase (SEI) layer to alleviate the volume expansion and improve Li+ transport of silicon anodes in high-energy lithium-ion batteries. The results show that the silicon anode coated with the S-ARSEI layer maintains a high reversible capacity and exhibits excellent rate performance.
ACS APPLIED ENERGY MATERIALS
(2022)
Article
Chemistry, Physical
Changsheng Song, Baoxun Zhao, Siyu Chen, Jinyang Ma, Hongbin Du
Summary: A new method for preparing silicon-nickel-carbon composites with high mechanical strength and ion diffusivity has been developed, improving the performance of lithium-ion batteries. The composites show stable performance during long-term cycling and exhibit better capacity retention compared to conventional materials.
Article
Chemistry, Physical
Che-Bin Chang, Chun-Yu Tsai, Kuan-Ting Chen, Hsing-Yu Tuan
Summary: Phosphorus-hyperdoped silicon nanowires (PH-SiNWs) are synthesized in large scale via the tin (Sn)-seeded supercritical fluid-liquid-solid (SFLS) method, with very low resistivity. These PH-SiNWs show improved cycling life and performance as an anode material in lithium-ion batteries.
ACS APPLIED ENERGY MATERIALS
(2021)
Article
Nanoscience & Nanotechnology
Ghulam Farid, Yi Yang, Abdul Mateen, Chenliang Huo, Hui Wang, Kui-Qing Peng
Summary: This study reveals the relationship between the oxidative dissolution of silver in hot water and the crack formation in metal-assisted etched silicon nanowire arrays. A general strategy for rapidly generating cracked silicon nanowire array membranes is proposed. The rapid metal dissolution by wet metal etchants shortens the soaking process to 1 minute or less.
ACS APPLIED NANO MATERIALS
(2022)
Article
Chemistry, Physical
Fengjun Zhao, Linyu Yang, Hang Yang, Zhen Wang, Shurong Xu, Qingxuan Sui, Jun Liu
Summary: The coupling strategy of metal sulfides and metal-organic frameworks derived carbon materials has shown promising results for enhancing lithium storage performance. In this study, a SnS decorated ZnS/3D porous carbon composite was successfully prepared and exhibited improved electrochemical properties for lithium storage.
JOURNAL OF ALLOYS AND COMPOUNDS
(2022)
Article
Chemistry, Applied
Bao-Shun Wang, Ren-Ying Li, Zhi-Yun Zhang, Xing-Wang, Xiao-Ling Wu, Guo-An Cheng, Rui-Ting Zheng
Article
Materials Science, Multidisciplinary
Jie Luo, Lin Liu, Fang Sun, Xuyao Tang, Rui-ting Zheng, Xiao-ling Wu, Guo-an Cheng
DIAMOND AND RELATED MATERIALS
(2020)
Article
Chemistry, Analytical
Zheng-Guang Hu, Zhi-Yuan Tan, Fang Sun, Zhong Lin, Jun Chen, Xu-yao Tang, Jie Luo, Ling Sun, Rui-Ting Zheng, Yong-Chong Chen, Guo-An Cheng
JOURNAL OF ELECTROANALYTICAL CHEMISTRY
(2020)
Article
Materials Science, Coatings & Films
Zijian Deng, Chungang Guo, Kun Tian, Wenjia Shi, Guoan Cheng, Ruiting Zheng
SURFACE & COATINGS TECHNOLOGY
(2020)
Article
Nanoscience & Nanotechnology
Qiyu Chen, Xiaolu Yan, Leyuan Wu, Yue Xiao, Sien Wang, Guoan Cheng, Ruiting Zheng, Qing Hao
Summary: Composite films consisting of reduced graphene oxides and single-wall carbon nanotubes were synthesized and found to have increasing in-plane thermal conductivities from 100 to 400 K. The unique temperature dependence is attributed to the largely restricted phonon mean free paths within the graphene sheets that contribute to the in-plane thermal transport. The highest in-plane thermal conductivity achieved was 62.8 W/(m·K) at 300 K, ideal for applications like flexible film-like thermal diodes.
ACS APPLIED MATERIALS & INTERFACES
(2021)
Article
Optics
Wen-Ling Li, Jing-Wei Liu, Guo-An Cheng, Qing-Zhong Huang, Rui-Ting Zheng, Xiao-Ling Wu
Summary: In this study, a diffraction grating based on a multilayer silicon nitride waveguide is proposed, which demonstrates high upward diffraction efficiency and large effective length. The analysis shows that the diffraction grating has a high tolerance to process variations and can adjust the near-field effective length. The research results suggest that this diffraction grating has potential applications in optical sensing and imaging.
Article
Materials Science, Multidisciplinary
Renying Li, Zhong Lin, Kelin Zhu, Lin Liu, Jinxiao Li, Xiaoling Wu, Ruiting Zheng, Guoan Cheng
Summary: In this study, a large-area single-phase VO2 film was prepared and the coexistence of two phases during the phase transition process was observed. The gradual monoclinic-to-rutile phase transition was confirmed by in situ Raman-scattering mapping scans. This research provides important insights into the mechanism of metal-insulator phase transitions.
Article
Engineering, Electrical & Electronic
Wen-ling Li, Jing-wei Liu, Guo-an Cheng, Rui-ting Zheng, Xiao-ling Wu
Summary: This work proposes and analyzes silicon nitride waveguide superlattices with air gaps, which help to improve the beam steering performance of optical phased arrays (OPAs) in the near-infrared waveband. By introducing air gaps beside the waveguide, the skin depth of the evanescent field is shortened and the effective index range of the waveguide is increased under single mode conditions, resulting in lower crosstalk compared to waveguides without air gaps. A waveguide superlattice with air gaps is designed using the eigenmode expansion method and particle swarm optimization, achieving optimized crosstalk of -24.3 dB at a waveguide pitch of 0.9 μm, propagation length of 1 mm, and wavelength of 905 nm.
IEEE PHOTONICS JOURNAL
(2023)
Article
Chemistry, Multidisciplinary
Jianguang Wang, Kelin Zhu, Xiaoling Wu, Guoan Cheng, Ruiting Zheng
Summary: This study systematically investigated the fabrication of 1 to 5 nm porous silicon using helium ion implantation and revealed the growth and regulation mechanism of helium bubbles in monocrystalline silicon at low temperatures. The growth of helium bubbles can be divided into three distinct stages, each with different formation mechanisms. The minimum average diameter of a helium bubble is approximately 2.3 nm, with a maximum number density of 4.2 x 10^23 m^-3. The porous structure cannot be obtained at injection temperatures below 115℃ or injection doses below 2.5 x 10^16 ions/cm^2. Both the ion implantation temperature and dose have an impact on the growth of helium bubbles in monocrystalline silicon. This research provides an effective approach for fabricating 1 to 5 nm nanoporous silicon, challenging traditional views and proposing new theories.
Proceedings Paper
Nanoscience & Nanotechnology
Fang Sun, Zhengguang Hu, Leyuan Wu, Jun Chen, Jie Luo, Xiaoling Wu, Guoan Cheng, Ruiting Zheng
21ST ANNUAL CONFERENCE AND 10TH INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO-NANO TECHNOLOGY
(2020)
Article
Engineering, Environmental
Jun Chen, Yanlong Fu, Fang Sun, Zhengguang Hu, Xing Wang, Ting Zhang, Fengshou Zhang, Xiaoling Wu, Haisheng Chen, Guoan Cheng, Ruiting Zheng
CHEMICAL ENGINEERING JOURNAL
(2020)
Article
Nanoscience & Nanotechnology
Xuyao Tang, Hongxin Yue, Lin Liu, Jie Luo, Xiaoling Wu, Ruiting Zheng, Guoan Cheng
ACS APPLIED NANO MATERIALS
(2020)
Article
Nanoscience & Nanotechnology
Yulong Wu, Zhiyu Guan, Peng Meng, Lin Liu, Ting Zhang, Guoan Cheng, Xiaoling Wu, Ruiting Zheng
ACS APPLIED NANO MATERIALS
(2019)
Article
Materials Science, Multidisciplinary
Peng Meng, Quan Zhang, Yulong Wu, Renying Li, Xuyao Tang, Guoan Cheng, Xiaoling Wu, Shaolong Wu, Ruiting Zheng
JOURNAL OF MATERIALS CHEMISTRY C
(2019)