Microstructural and chemical analysis of polycrystalline LiNbO3 films obtained by room-temperature RF sputtering after various annealing durations

Published 2020 View Full Article

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Title
Microstructural and chemical analysis of polycrystalline LiNbO3 films obtained by room-temperature RF sputtering after various annealing durations
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 38, Issue 4, Pages 043205
Publisher
American Vacuum Society
Online
2020-06-23
DOI
10.1116/6.0000209

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