The role of plasma in plasma-enhanced atomic layer deposition of crystalline films

Published 2020 View Full Article

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Title
The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 38, Issue 4, Pages 040801
Publisher
American Vacuum Society
Online
2020-05-18
DOI
10.1116/6.0000145

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