Study on subsurface damage and surface quality of silicon carbide ceramic induced by a novel non-resonant vibration-assisted roll-type polishing

Published 2020 View Full Article

Authors

Keywords

Vibration-assisted, Roll-type polishing, Silicon carbide (SiC) ceramic, Subsurface damage, Surface roughness and uniformity, Finite element simulation, Material removal rate

Journal

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

Volume 282, Issue -, Pages 116667

Publisher

Elsevier BV

Online

2020-02-25

DOI

10.1016/j.jmatprotec.2020.116667

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