The effect of low-angle off-axis GaN substrate orientation on the surface morphology of Mg-doped GaN epilayers

Title
The effect of low-angle off-axis GaN substrate orientation on the surface morphology of Mg-doped GaN epilayers
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 128, Issue 5, Pages 055301
Publisher
AIP Publishing
Online
2020-08-03
DOI
10.1063/5.0016036

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