Optimization of discharge antenna turn and modulation of EEPFs and plasma parameters in dual-frequency cylindrical ICP source at different gas pressures
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Title
Optimization of discharge antenna turn and modulation of EEPFs and plasma parameters in dual-frequency cylindrical ICP source at different gas pressures
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 128, Issue 1, Pages 013301
Publisher
AIP Publishing
Online
2020-07-02
DOI
10.1063/5.0006646
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