Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 67, Issue 7, Pages 2760-2764Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2020.2992014
Keywords
AlGaN; drain current ON/OFF ratio; GaN; high electron mobility transistor (HEMT); leakage; postmetallization annealing (PMA); subthreshold swing (SS)
Funding
- Holonyak Micro and Nanotechnology Laboratory, University of Illinois at Urbana-Champaign, IL, USA
- Frederick Seitz Materials Research Laboratory Central Facilities, University of Illinois at Urbana-Champaign, IL, USA
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Al2O3-passivated Schottky-gate AlGaN/GaN high electron mobility transistors (HEMTs) with improved subthreshold swing (SS) and drain current ON/OFF ratio by postmetallization annealing (PMA) at 500 degrees C in N-2 ambient are reported. With the PMA, the gate leakage current in the reverse biased region and the OFF-state drain current are reduced by more than three orders of magnitude, leading to a low SS of 84.75 mV/dec and a high drain current ON/OFF ratio of 2.1 x 10(7). Through temperature-dependent current-voltage measurements on dual-Schottky-gate structures and capacitance-voltage measurements on Al2O3/AlGaN/GaN metal-insulator-semiconductor (MIS) HEMT capacitors, it is identified that the PMA greatly suppresses both the Al2O3/AlGaN interface leakage current and the reverse gate leakage current by eliminating Al2O3/AlGaN interface trap states with 0.34 eV trap state energy and changing the dominant mechanism of reverse gate leakage conduction from trap-assisted tunneling to Fowler-Nordheim tunneling, respectively. Overall, this work reports on the effectiveness of PMA in improving the performance of Schottky-gate AlGaN/GaN HEMTs and the underlying improving mechanisms.
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