Microstructure and texture of polycrystalline 3C–SiC thick films characterized via EBSD

Title
Microstructure and texture of polycrystalline 3C–SiC thick films characterized via EBSD
Authors
Keywords
3C–SiC, Preferred orientation, Thick film, EBSD, Growth mechanism
Journal
CERAMICS INTERNATIONAL
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2020-07-21
DOI
10.1016/j.ceramint.2020.07.177

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