Reaction of BCl3 with H- and Cl-terminated Si(100) as a pathway for selective, monolayer doping through wet chemistry

Published 2020 View Full Article

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Title
Reaction of BCl3 with H- and Cl-terminated Si(100) as a pathway for selective, monolayer doping through wet chemistry
Authors
Keywords
silicon, shallow doping, boron, XPS, monolayer doping
Journal
APPLIED SURFACE SCIENCE
Volume -, Issue -, Pages 146907
Publisher
Elsevier BV
Online
2020-06-05
DOI
10.1016/j.apsusc.2020.146907

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