4.8 Article

Double-Gate MoS2 Field-Effect Transistor with a Multilayer Graphene Floating Gate: A Versatile Device for Logic, Memory, and Synaptic Applications

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 12, Issue 30, Pages 33926-33933

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.0c08802

Keywords

floating gate; NAND flash; MoS2; multilayer graphene; synapse; double-gate FET

Funding

  1. National Science Foundation (NSF) [CMMI-1938179]
  2. Semiconductor Research Corporation (SRC) [2962.001]

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2D materials with low-temperature processing hold promise for electronic devices that augment conventional silicon technology. To meet this promise, devices should have capabilities not easily achieved with silicon technology, including planar fully-depleted silicon-on-insulator with substrate body-bias, or vertical finFETs with no body-bias capability. In this work, we fabricate and characterize a device [a double-gate MoS2 field-effect transistor (FET) with hexagonal boron nitride (h-BN) gate dielectrics and a multi-layer graphene floating gate (FG)] in multiple operating conditions to demonstrate logic, memory, and synaptic applications; a range of h-BN thicknesses is investigated for charge retention in the FG. In particular, we demonstrate this device as a (i) logic FET with adjustable V-T by charges stored in the FG, (ii) digital flash memory with lower pass-through voltage to enable improved reliability, and (iii) synaptic device with decoupling of tunneling and gate dielectrics to achieve a symmetric program/erase conductance change. Overall, this versatile device, compatible to back-end-of-line integration, could readily augment silicon technology.

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