Radio frequency powered spiral hollow cathodes

Published 2020 View Full Article

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Title
Radio frequency powered spiral hollow cathodes
Authors
Keywords
Hollow cathode, Spiral hollow cathode, Radio frequency power, Coating, Ion etching, Atmospheric plasma
Journal
VACUUM
Volume 175, Issue -, Pages 109241
Publisher
Elsevier BV
Online
2020-02-05
DOI
10.1016/j.vacuum.2020.109241

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