Ultrathin silicon oxide prepared by in-line plasma-assisted N2O oxidation (PANO) and the application for n-type polysilicon passivated contact

Published 2020 View Full Article

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Title
Ultrathin silicon oxide prepared by in-line plasma-assisted N2O oxidation (PANO) and the application for n-type polysilicon passivated contact
Authors
Keywords
Polysilicon passivated contact, Plasma-assisted N, 2, O oxidation, Ultrathin silicon oxide, TOPCon
Journal
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume 208, Issue -, Pages 110389
Publisher
Elsevier BV
Online
2020-01-02
DOI
10.1016/j.solmat.2019.110389

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