Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition

Title
Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 28, Issue 5, Pages 1247-1255
Publisher
American Chemical Society (ACS)
Online
2016-02-17
DOI
10.1021/acs.chemmater.5b04422

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