Kinetics and Coverage Dependent Reaction Mechanisms of the Copper Atomic Layer Deposition from Copper Dimethylamino-2-propoxide and Diethylzinc

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Title
Kinetics and Coverage Dependent Reaction Mechanisms of the Copper Atomic Layer Deposition from Copper Dimethylamino-2-propoxide and Diethylzinc
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 28, Issue 17, Pages 6282-6295
Publisher
American Chemical Society (ACS)
Online
2016-08-11
DOI
10.1021/acs.chemmater.6b02522

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