Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 309, Issue -, Pages -Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2020.127814
Keywords
H-2 sensor; Fast response/recovery; Pd-Mg bimetal; Ti nanoparticles layer
Funding
- Nano-Material Technology Development Program through the National Research Foundation of Korea (NRF) - Ministry of Science, ICT, and Future Planning [NRF-2015M3A7B7045230]
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This work reports on the hydrogenation and dehydrogenation abilities of the Pd-Mg bimetal capped Ti nanoparticles (NPs) layer on Si substrate, which were prepared by the Radio Frequency magnetron sputtering system (RF sputtering). Samples were prepared by varying the deposition rate and annealing conditions, then characterized using the FE-SEM, XRD, and XPS to investigate the optimum material structure for better sensing performance. The fabricated devices show resistivity changing in the hydrogenation state and a complete reversible dehydrogenation at room temperature (RT = similar to 25 degrees C). The fabricated device showed a detection range of 1,000-10,000 ppm and fast hydrogenation/dehydrogenation time of 3/3 s for 10,000 ppm (1 vol%) at RT along with good selectivity. This Pd-Mg bimetal capped Ti nanoparticles (Pd-Mg/TiNPs) layer on silicon (Si) substrate can be a potential sensing device for its application in low temperature environments where fast hydrogenation/dehydrogenation processes are required.
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