Double-Actuator Position-Feedback Mechanism for Adjustable Sensitivity in Electrostatic-Capacitive MEMS Force Sensors

Published 2020 View Full Article

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Title
Double-Actuator Position-Feedback Mechanism for Adjustable Sensitivity in Electrostatic-Capacitive MEMS Force Sensors
Authors
Keywords
Force sensor, double-actuator position-feedback mechanism, adjustable sensitivity, electrostatic-capacitive MEMS
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume -, Issue -, Pages 112127
Publisher
Elsevier BV
Online
2020-05-31
DOI
10.1016/j.sna.2020.112127

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