Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries

Published 2016 View Full Article

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Title
Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 28, Issue 10, Pages 3435-3445
Publisher
American Chemical Society (ACS)
Online
2016-04-28
DOI
10.1021/acs.chemmater.6b00853

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