Study of morphological and electrical properties of the ZnO/p-Si hetero-junction: Application to sensing efficiency of low concentration of ethanol vapor at room temperature

Title
Study of morphological and electrical properties of the ZnO/p-Si hetero-junction: Application to sensing efficiency of low concentration of ethanol vapor at room temperature
Authors
Keywords
ZnO thin film, Hetero-junction, Reactive DC sputtering, Room temperature, Low concentrations of ethanol vapor, Gas sensing
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 109, Issue -, Pages 104926
Publisher
Elsevier BV
Online
2020-01-14
DOI
10.1016/j.mssp.2020.104926

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