Utilizing photosensitive polymers to evaluate UV radiation exposures in different plasma chamber configurations

Published 2020 View Full Article

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Title
Utilizing photosensitive polymers to evaluate UV radiation exposures in different plasma chamber configurations
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 38, Issue 3, Pages 033006
Publisher
American Vacuum Society
Online
2020-03-30
DOI
10.1116/1.5143032

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