Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching

Title
Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching
Authors
Keywords
SPDT, IBE, SiC, Mold, Microlens array
Journal
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume 278, Issue -, Pages 116510
Publisher
Elsevier BV
Online
2019-11-23
DOI
10.1016/j.jmatprotec.2019.116510

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