Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations

Published 2016 View Full Article

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Title
Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations
Authors
Keywords
Nitrides, Films, Hardness, Mechanical properties, Strength
Journal
CERAMICS INTERNATIONAL
Volume 42, Issue 10, Pages 11743-11756
Publisher
Elsevier BV
Online
2016-04-30
DOI
10.1016/j.ceramint.2016.04.095

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