Resistive switching characteristics of sputtered AlN thin films

Published 2016 View Full Article

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Title
Resistive switching characteristics of sputtered AlN thin films
Authors
Keywords
AlN, Sputtering, Resistive random access memory (RRAM), Resistive switching
Journal
CERAMICS INTERNATIONAL
Volume 42, Issue 8, Pages 9496-9503
Publisher
Elsevier BV
Online
2016-03-11
DOI
10.1016/j.ceramint.2016.03.022

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